RF MEMS ：Theory, Design, and Technology

Publication subTitle ：Theory, Design, and Technology

Author： Gabriel M. Rebeiz  

Publisher： John Wiley & Sons Inc‎

Publication year： 2004

E-ISBN: 9780471462880

P-ISBN(Hardback):  9780471201694

Subject： TN4 microelectronics, integrated circuit (IC)

Language： ENG

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Description

Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.

Chapter

CONTENTS

pp.：  9 – 19

Preface

pp.：  19 – 25

1 Introduction: RF MEMS for Microwave Applications

pp.：  25 – 45

2 Mechanical Modeling of MEMS Devices: Static Analysis

pp.：  45 – 83

3 Mechanical Modeling of MEMS Devices: Dynamic Analysis

pp.：  83 – 111

4 Electromagnetic Modeling of MEMS Switches

pp.：  111 – 145

5 MEMS Switch Library

pp.：  145 – 181

6 MEMS Switch Fabrication and Packaging

pp.：  181 – 209

7 MEMS Switch Reliability and Power Handling

pp.：  209 – 245

8 Design of MEMS Switch Circuits

pp.：  245 – 283

9 MEMS Phase Shifters

pp.：  283 – 321

10 Distributed MEMS Phase Shifters and Switches

pp.：  321 – 351

11 MEMS Varactors and Tunable Oscillators

pp.：  351 – 383

12 Micromachined Inductors

pp.：  383 – 407

13 Reconfigurable MEMS Networks, Filters, Antennas, and Subsystems

pp.：  407 – 453

14 Phase Noise Analysis of MEMS Circuits, Phase Shifters, and Oscillators

pp.：  453 – 473

15 Future Work in RF MEMS

pp.：  473 – 481

Appendix A Detailed Analysis and Measurements of Intermodulation Distortion and Power Handling in RF MEMS Switches, Varactors, and Tunable Filters

pp.：  481 – 497

Appendix B Mechanical, Electrical, and Thermal Properties of RF MEMS Materials

pp.：  497 – 503

Index

pp.：  503 – 507

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