Tribological properties of carbon- and nitrogen-implanted Si(100)

Author： Kodali P. Hawley M. Walter K.C. Hubbard K. Yu N. Tesmer J.R. Levine T.E. Nastasi M.

Publisher： Elsevier

ISSN： 0043-1648

Source： Wear, Vol.205, Iss.1, 1997-04, pp. : 144-152

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