A study of positive charge effect on AFM anodization lithography using metal phosphate monolayers

Author: Kim S.M.   Ahn S.J.   Lee H.   Kim E.R.   Lee H.  

Publisher: Elsevier

ISSN: 0304-3991

Source: Ultramicroscopy, Vol.91, Iss.1, 2002-05, pp. : 165-169

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Abstract