Conducting Strontium Ruthenium Oxide Interface Layers for Application to PZT/SrRuO 3 /Metal Thin Film Capacitors

ISSN： 0015-0193

Source： Ferroelectrics, Vol.293, Iss.1, 2003-01, pp. : 127-134

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Abstract

Ferroelectric lead zirconate titanate (PZT) thin films have been prepared by chemical solution deposition (CSD) and were spin-coated onto stainless steel substrates. In order to improve the ferroelectric properties, the influence of an additional layer of strontium ruthenium oxide (SrRuO₃) at the interface between the perovskite type PZT and the metal substrate has been studied. The elaboration route of the SrRuO₃ thin films by CSD and spin-coating is presented. The influence from the annealing temperature on the PZT crystallization behavior has been analyzed by X-ray diffraction, and the PZT coercive field and remanent polarization were investigated as a function of the SrRuO₃ process parameters. The results are compared with those obtained for PZT/RuO₂/metal thin film capacitors.