Fabrication of High Frequency Bulk Acoustic Wave Resonator Using Thinned Single-Crystal Lithium Niobate Layers

Author： Gachon D.   Courjon E.   Martin G.   Gauthier-Manuel L.   Jeannot J. -C.   Daniau W.   Ballandras S.  

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.362, Iss.1, 2008-01, pp. : 30-40

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