Preparation of ZnO Thin Film on Diamond-Like Carbon/Si Substrate by RF Magnetron Sputtering for Surface Acoustic Wave Application

Author： Shih Wen-Ching   Huang Rei-Ching   Peng Yan-Kai   Wu Mu-Shiang  

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.380, Iss.1, 2009-01, pp. : 20-29

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