Investigations of the Adhesion of Maleic Anhydride/Cyclic Olefin Alternating Copolymers to Silicon Substrates: Improved Materials for 193 nm Lithography

Author： Pasquale Anthony J.  

Publisher： Taylor & Francis Ltd

ISSN： 0021-8464

Source： Journal of Adhesion, Vol.78, Iss.1, 2002-01, pp. : 1-13

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