Ellipsometry, FTIR, Raman and X-Ray Spectroscopy Analysis of PECVD a-Si1-xCx:H Film

Author: Hong Rongdun  

Publisher: Taylor & Francis Ltd

ISSN: 0038-7010

Source: Spectroscopy Letters, Vol.43, Iss.4, 2010-05, pp. : 298-305

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Abstract