Analytical Evaluation of a Reduced-Pressure Microwave-Induced Plasma Studied by Optical Emission Spectrometry Method

Author: Matusiewicz Henryk   Slachcinski Mariusz  

Publisher: Taylor & Francis Ltd

ISSN: 0038-7010

Source: Spectroscopy Letters, Vol.44, Iss.2, 2011-03, pp. : 128-137

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