Advanced Oxidation Processes in the Removal of Organics From Silicon Surfaces in IC Manufacturing: Theoretical Concepts

Author: Smedt F. De   Vankerckhoven H.   Vinckier C.  

Publisher: Taylor & Francis Ltd

ISSN: 0191-9512

Source: Ozone: Science and Engineering, Vol.25, Iss.5, 2003-10, pp. : 445-451

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Abstract