INTRINSIC-CARRIER THERMAL RUNAWAY IN SILICON MICROCANTILEVERS

Author: Chui B. W.   Asheghi M.   Ju Y. S.   Goodson K. E.   Kenny T. W.   Mamin H. J.  

Publisher: Taylor & Francis Ltd

ISSN: 1091-7640

Source: Microscale Thermophysical Engineering, Vol.3, Iss.3, 1999-07, pp. : 217-228

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Abstract