Development of a microelectromechanical system pressure sensor for rehabilitation engineering applications

Author： Ho Jyh-Jier Fang Y. K. Hsieh M. C. Ting S. F. Chen G. S. Ju M. S. Chen Terry Y. Huang C. R. Chen C. Y.

ISSN： 1362-3060

Source： International Journal of Electronics, Vol.87, Iss.6, 2000-06, pp. : 757-767

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