Author： Khisaeva Z. F.
Publisher： Taylor & Francis Ltd
ISSN： 0149-5739
Source： Journal of Thermal Stresses, Vol.29, Iss.3, 2006-03, pp. : 201-216
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Abstract
The operation of micro-/nanobeams vibrating at very high frequencies, such as encountered in micro-/nanoelectromechanical systems (MEMS/NEMS), hinges on the minimization of intrinsic material losses. We study the associated thermoelastic damping in such beams from the standpoint of a generalized theory of thermoelasticity with one relaxation time. Some of our results relate to: (i) the cooling (instead of heating) in the compressed surface of the beam; (ii) the existence of not one damping peak appearing in the classical theory, but many peaks, with a decreasing amplitude as the frequency tends to infinity; (iii) the relevance of thermoelasticity with finite wave speeds for frequencies on the order of 10 12 Hz.
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