Surface roughness induced by plasma etching of Si-containing polymers

Author: Tserepi A.   Gogolides E.   Constantoudis V.   Cordoyiannis G.   Raptis I.   Valamontes E. S.  

Publisher: Taylor & Francis Ltd

ISSN: 1568-5616

Source: Journal of Adhesion Science and Technology, Vol.17, Iss.8, 2003-08, pp. : 1083-1091

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