Plasma surface modification of poly(phenylene sulfide) films for copper metallization

Author: Inagaki Norihiro   Narushima Kazuo   Morita Masahiro  

Publisher: Taylor & Francis Ltd

ISSN: 1568-5616

Source: Journal of Adhesion Science and Technology, Vol.20, Iss.9, 2006-06, pp. : 917-938

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