Microassembly of hybrid magnetic MEMS

Author: Vikramaditya Barmeshwar   Nelson Bradley J.   Yang Ge   Enikov Eniko T.  

Publisher: VSP

ISSN: 1568-5632

Source: Journal of Micromechatronics, Vol.1, Iss.2, 2001-01, pp. : 99-116

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract