Nanopositioning of a multi-axis microactuator using visual servoing

Author: Sun Yu   Greminger Michael A.   Nelson Bradley J.  

Publisher: VSP

ISSN: 1568-5632

Source: Journal of Micromechatronics, Vol.2, Iss.2, 2002-08, pp. : 141-155

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract