Comparison of pull-in voltages in MEMS using 3D FEM and analytical approaches

Author: Bölöni Francisc   Benabou Abdelkader   Tounzi Abdelmounaïm  

Publisher: Emerald Group Publishing Ltd

ISSN: 0332-1649

Source: COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol.29, Iss.6, 2010-11, pp. : 1653-1661

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content