Plasma Oxidation Process of Silicon Surfaces Investigated by Infrared Spectroscopy

Author： Shinohara Masanori Katagiri Teruaki Iwatsuji Keitaro Matsuda Yoshinobu Kimura Yasuo Niwano Michio Fujiyama Hiroshi

Publisher： Science and Technology Network Inc.

ISSN： 1203-8407

Source： Journal of Advanced Oxidation Technologies, Vol.8, Iss.1, 2005-01, pp. : 41-46

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