Electrical parameters and concentrations of charged particles in methane plasma

Author： Semenova O.   Efremov A.   Barinov S.   Kuchumov A.   Svetsov V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.42, Iss.5, 2013-09, pp. : 301-308

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