A Level Set Approach to a Unified Model for Etching, Deposition, and Lithography I: Algorithms and Two-Dimensional Simulations

Author： Adalsteinsson D. Sethian J.A.

Publisher： Academic Press

ISSN： 0021-9991

Source： Journal of Computational Physics, Vol.120, Iss.1, 1995-08, pp. : 128-144

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