Fabrication of SiGe quantum devices by electron-beam induced damage

Author： Ryan J.M.   Broers A.N.   Paul D.J.   Pepper M.   Whall T.E.   Fernandez J.M.   Joyce B.A.  

Publisher： Academic Press

ISSN： 0749-6036

Source： Superlattices and Microstructures, Vol.21, Iss.1, 1997-01, pp. : 29-36

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