Annealing effects on mobility-limiting mechanisms in modulation doping Si/Si0.8 Ge0.2 heterostructures

Author: Ueno T.   Yutani A.   Shiraki Y.   Nakagawa K.  

Publisher: Academic Press

ISSN: 0749-6036

Source: Superlattices and Microstructures, Vol.25, Iss.1, 1999-01, pp. : 319-324

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Abstract