MEMS :A Practical Guide to Design, Analysis and Applications

Publication subTitle :A Practical Guide to Design, Analysis and Applications

Author: Korvink   Jan;Paul   Oliver;Korvink   Jan  

Publisher: Elsevier Science‎

Publication year: 2005

E-ISBN: 9780815518280

P-ISBN(Paperback): 9780815514978

P-ISBN(Hardback):  9780815514978

Subject: TN4 microelectronics, integrated circuit (IC)

Language: ENG

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Description

Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for ôsmaller, better, cheaper, and faster'ö If you are a product development engineer or manager, the decision to design a MEMS device implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting solutions, technologies and design support tools. You will see how experts from around the world have explored MEMS possibilities and achieved new breakthrough devices such as RF-MEMS for mobile telecommunications, micro-optics for internet hardware, catheter-based minimal-invasive operating theatre tools, and in vivo monitoring of exact dosage of medication in ailing patients. This handbook offers a wealth of analytical techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness.

Chapter

Front Cover

pp.:  1 – 2

Copyright Page

pp.:  3 – 6

Contents

pp.:  6 – 18

Foreword

pp.:  18 – 20

Preface

pp.:  20 – 28

Chapter 2. Material Properties: Measurement and Data

pp.:  80 – 120

Chapter 3. MEMS and NEMS Simulation

pp.:  120 – 214

Chapter 4. System-Level Simulation of Microsystems

pp.:  214 – 256

Chapter 5. Thermal-Based Microsensors

pp.:  256 – 308

Chapter 6. Photon Detectors

pp.:  308 – 372

Chapter 7. Free-Space Optical MEMS

pp.:  372 – 430

Chapter 8. Integrated Micro-Optics

pp.:  430 – 480

Chapter 9. Microsensors for Magnetic Fields

pp.:  480 – 550

Chapter 10. Mechanical Microsensors

pp.:  550 – 594

Chapter 11. Semiconductor-Based Chemical Microsensors

pp.:  594 – 694

Chapter 12. Microfluidics

pp.:  694 – 756

Chapter 13. Biomedical Systems

pp.:  756 – 778

Chapter 14. Microactuators

pp.:  778 – 832

Chapter 15. Micromachining Technology

pp.:  832 – 880

Chapter 16. LIGA Technology for R&D and Industrial Applications

pp.:  880 – 928

Chapter 17. Interface Circuitry and Microsystems

pp.:  928 – 970

Contributors

pp.:  970 – 972

Index

pp.:  972 – 994

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