Ion Implantation Technology - 94
Author： Coffa S.;Ferla G.;Rimini E.
Publisher： Elsevier Science
Publication year： 1995
E-ISBN: 9780444599728
P-ISBN(Paperback): 9780444821942
P-ISBN(Hardback): 9780444821942
Subject： O43 Optics
Language： ENG
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Description
The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.
The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
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