Laser Microfabrication ：Thin Film Processes and Lithography

Publication subTitle ：Thin Film Processes and Lithography

Author： Ehrlich   Daniel J.;Tsao   Jeffrey Y.  

Publisher： Elsevier Science‎

Publication year： 1989

E-ISBN: 9780080918020

P-ISBN(Paperback): 9780122334306

P-ISBN(Hardback):  9780122334306

Subject： TN249 laser application

Language： ENG

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Description

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

Chapter

Front Cover

pp.：  1 – 4

Laser Microfabrication: Thin Film Processes and Lithography

pp.：  4 – 5

Copyright Page

pp.：  5 – 6

Table of Contents

pp.：  6 – 10

Contributors

pp.：  10 – 12

Preface

pp.：  12 – 16

PART I: Technology

pp.：  16 – 100

PART II: Fundamentals

pp.：  100 – 346

PART III: Reactions

pp.：  346 – 596

Index

pp.：  596 – 603

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