Publication series :Volume 52
Author: Willardson R. K.;Weber Eicke R.
Publisher: Elsevier Science
Publication year: 1998
E-ISBN: 9780080864501
P-ISBN(Paperback): 9780127521602
P-ISBN(Hardback): 9780127521602
Subject: TN4 microelectronics, integrated circuit (IC)
Language: ENG
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Description
This volume addresses the subject of materials science, specifically the materials aspects, device applications, and fabricating technology of SiC.
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