Diamond Films :Chemical Vapor Deposition for Oriented and Heteroepitaxial Growth

Publication subTitle :Chemical Vapor Deposition for Oriented and Heteroepitaxial Growth

Author: Kobashi   Koji  

Publisher: Elsevier Science‎

Publication year: 2010

E-ISBN: 9780080525570

P-ISBN(Paperback): 9780080447230

P-ISBN(Hardback):  9780080447230

Subject: O6-0 chemical principle and method;TB3 Engineering Materials

Language: ENG

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Description

  • Discusses the most advanced techniques for diamond growth

  • Assists diamond researchers in deciding on the most suitable process conditions

  • Inspires readers to devise new CVD (chemical vapor deposition


Ever since the early 1980s, and the discovery of the vapour growth methods of diamond film, heteroexpitaxial growth has become one of the most important and heavily discussed topics amongst the diamond research community. Kobashi has documented such discussions with a strong focus on how diamond films can be best utilised as an industrial material, working from the premise that crystal diamond films can be made by chemical vapour disposition. Kobashi provides information on the process and characterization technologies of oriented and heteroepitaxial growth of diamond films.

Chapter

Front Cover

pp.:  1 – 4

Copyright Page

pp.:  5 – 10

Preface

pp.:  6 – 8

Acknowledgment

pp.:  8 – 16

CONTENTS

pp.:  10 – 6

Chapter 2. Diamond – Structure and CVD Growth

pp.:  22 – 30

Chapter 3. Microwave Plasma CVD Reactors

pp.:  30 – 38

Chapter 4. Other Reactors

pp.:  38 – 44

Chapter 5. Crystal Orientations and Film Surface Morphology

pp.:  44 – 66

Chapter 6. Formation of Twins

pp.:  66 – 78

Chapter 7. Homoepitaxial Growth

pp.:  78 – 94

Chapter 8. Surface Reconstruction

pp.:  94 – 104

Chapter 9. Heteroepitaxial Growth on cBN, Ni, and Other Substrates

pp.:  104 – 134

Chapter 10. Diamond Nucleation

pp.:  134 – 170

Chapter 11. HOD Film Growth

pp.:  170 – 248

Chapter 12. Oriented Growth on Noble Metals

pp.:  248 – 278

Chapter 13. Properties and Applications of Heteroepitaxial Diamond Films

pp.:  278 – 302

Chapter 14. Conclusions

pp.:  302 – 304

APPENDICES

pp.:  304 – 332

References

pp.:  332 – 348

Index

pp.:  348 – 351

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