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Journal of Electron Microscopy, Vol. 50, Iss. 6, 2002-02 ,pp. : 509-515

Oxford University Press

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spectrum-imaging, electron energy-loss spectroscopy, scanning transmission electron microscopy, elemental mapping, multilayer

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Time-resolved acquisition technique for spatially-resolved electron energy-loss spectroscopy by energy-filtering TEM

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High-resolution transmission electron microscopy and electron energy-loss spectroscopy study of polycrystalline-Si/ZrO 2 /SiO 2 /Si metal-oxide-semiconductor structures

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