Analytical electron microscopy study of nanometre-scale oxide formed in contact-hole-bottom Si surfaces

Author： Yang J-M. Park J-C. Park Y-B. Kim J-J. Back T-S. Lee H-S. Lee S-Y. Park S-W.

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.52, Iss.3, 2003-06, pp. : 305-308

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