Development of a gas injection/specimen heating holder for use with transmission electron microscope

Author: Kamino Takeo   Yaguchi Toshie   Konno Mitsuru   Watabe Akira   Marukawa Tomotaka   Mima Takayuki   Kuroda Kotaro   Saka Hiroyasu   Arai Shigeo   Makino Hiroshi   Suzuki Yoshinao   Kishita Keisuke  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.54, Iss.6, 2005-12, pp. : 497-503

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Abstract

A new gas injection/specimen heating holder is developed for the purpose of in situ observation of gas reaction of materials at high temperatures in a transmission electron microscope at near-atomic resolution. A fine tungsten wire is employed as a heating element of the holder and a battery is used as the power source. Gas was injected onto specimens in the form of particles lying on the heating element via a nozzle. The maximum pressure near specimens was middle of 10−2 Pa, while the pressure in the electron-gun chamber was kept to 2 × 10−4 Pa. This gas injection/specimen heating holder was applied to observe solid–gas reactions. The reactions observed include oxidation of pure In into In2O3, reduction of SiO2 into Si and re-oxidation of Si into SiO2.

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