Simulation Study on Image Contrast and Spatial Resolution in Helium Ion Microscope

Author: Inai Kensuke   Ohya Kaoru   Ishitani Tohru  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.56, Iss.5, 2007-10, pp. : 163-169

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract