Contrast mechanism due to interface trapped charges for a buried SiO 2 microstructure in scanning electron microscopy

Author： Zhang Hai-Bo   Li Wei-Qin   Wu Dan-Wei  

Publisher： Oxford University Press

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.58, Iss.1, 2009-01, pp. : 15-19

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