Beam damage suppression of low- porous SiOC films by cryo-electron-energy loss spectroscopy (EELS)

Author： Otsuka Yuji   Shimizu Yumiko   Tanaka Isao  

Publisher： Oxford University Press

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.58, Iss.2, 2009-04, pp. : 29-34

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