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Applied Spectroscopy, Vol. 31, Iss. 2, 1977-03 ,pp. : 134-137

Society for Applied Spectroscopy

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Simple Optical Devices for Detection of Radiofrequency Oxygen Plasma Stripping of Photoresists

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Time Resolved Spectroscopic Characterization of a-C:H Deposition by Methane and Removal by Oxygen Inductively Coupled RF Plasma

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