Measurement of Excitation, Ionization, and Electron Temperatures and Positive Ion Concentrations in a 144 MHz Inductively Coupled Radiofrequency Plasma

Author: Walters P. E.   Chester T. L.   Winefordner J. D.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.31, Iss.1, 1977-01, pp. : 1-8

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