An Internally Tuned TM010 Microwave Resonant Cavity for Moderate Power Microwave-induced Plasmas

Author: Haas David L.   Carnahan Jon W.   Caruso Joseph A.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.37, Iss.1, 1983-01, pp. : 82-85

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Abstract