Thickness-Dependent Frequency Shift in Infrared Spectral Absorbance of Silicon Oxide Film on Silicon

Author: Gunde Marta Klanjšek   Aleksandrov Boris  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.44, Iss.6, 1990-07, pp. : 970-974

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Abstract