Characterization of Interstitial Oxygen Striations in Silicon Single Crystals by the Micro-FT-IR Method

Author: Iino Eiichi   Fusegawa Izumi   Yamagishi Hirotoshi  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.47, Iss.9, 1993-09, pp. : 1488-1491

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Abstract