Polymer Film Thickness Determination with a High-Precision Scanning Reflectometer

Author： Shelley Paul H. Booksh Karl S. Burgess Lloyd W. Kowalski Bruce R.

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.50, Iss.1, 1996-01, pp. : 119-125

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