Optimization of Discharge Parameters for a Flat-Type Radio-Frequency Glow Discharge Source Coupled to a Quadrupole Mass Spectrometer System

Author： Shick Charles R. Marcus R. Kenneth

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.50, Iss.4, 1996-04, pp. : 454-466

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