Using Raman Microscopy to Detect Leaks in Micromechanical Silicon Structures

Author: Weber W. H.   Zanini-Fisher M.   Pelletier M. J.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.51, Iss.1, 1997-01, pp. : 123-129

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Abstract