Conversion of a Pulsed 120-Hz, 3-kW, 2.45-GHz Generator for Continuous-Wave Output for Microwave-Induced Plasma Maintenance

Author: Brandl Patricia G.   Arnow Clarence L.   Caldwell Charles L.   Carnahan Jon W.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.51, Iss.2, 1997-02, pp. : 280-283

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Abstract