Investigation into the Analytical Utility of Plasma Etching in Reactive Glow Discharge Plasmas

Author： Barshick C. M.   Hess K. R.   Zook A. L.   Steiner R. E.   King F. L.  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.53, Iss.1, 1999-01, pp. : 65-73

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