High-Temperature Properties of a Low Dielectric Constant Organic Spin-on Glass for Multilevel Interconnects

Author： Wang C. Y. Shen Z. X. Zheng J. Z.

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.55, Iss.10, 2001-10, pp. : 1347-1351

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