Coherent Raman Spectroscopic Monitoring of Pulsed Radio Frequency PECVD of Silicon Nitride Thin Films

Author: Phillips B. J.   Steidley S. D.   Lau L. D.   Rodriguez R. G.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.55, Iss.7, 2001-07, pp. : 946-951

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content