Determination of the Thickness of Silazane-Based SiOx Coatings in the Submicrometer Range by Near-Infrared Reflection Spectroscopy

Author: Scherzer Tom   Mirschel Gabriele   Heymann Katja   Prager Lutz   Buchmeiser Michael R.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.63, Iss.2, 2009-02, pp. : 239-245

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