Fusion of metrology data for large-scale high-volume manufacturing of polymer-based microfluidic devices

Author: Shilpiekandula Vijay   Burns Daniel J.   Li Shiguang   Xu Zhiguang   Taylor Hayden K.   Youcef-Toumi Kamal   Fang Zhongping   Reading Ivan   Yoon Soon Fatt  

Publisher: Inderscience Publishers

ISSN: 1746-9392

Source: International Journal of Nanomanufacturing, Vol.3, Iss.4, 2009-07, pp. : 312-336

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Abstract