Virtual metrology-based engineering chain management by multi-classification of quality using support vector machine for semiconductor manufacturing

Author: Arima Sumika  

Publisher: Inderscience Publishers

ISSN: 1748-5037

Source: International Journal of Industrial and Systems Engineering, Vol.8, Iss.1, 2011-06, pp. : 1-18

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract