Edge chipping in rotary ultrasonic machining of silicon

Author： Cong W.L.   Feng Q.   Pei Z.J.   Deines T.W.   Treadwell C.  

Publisher： Inderscience Publishers

ISSN： 1750-0591

Source： International Journal of Manufacturing Research, Vol.7, Iss.3, 2012-08, pp. : 311-329

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